000 00524nam a22001937a 4500
005 20231006170337.0
008 231006b |||||||| |||| 00| 0 eng d
020 _a9780367391027
_cGBP 59.99
040 _aYMCAF
041 _aeng
082 _a621.381
_bBAN
100 _aBanks, Danny
245 _aMicroengineering, MEMS, and Interfacing
_bA practical guide
_cDanny Banks
260 _aBoca Raton
_bCRC Press
_c2006
300 _a326p.
650 _aElectrical engineering
650 _aMicroengineering
942 _cBK
999 _c18958
_d18958