000 00581nam a2200253Ia 4500
001 115883
003 YMCAF
005 20230512162735.0
008 120412s2010 ||||||||||||||||| ||und|d
024 _a115883
035 _a41602
040 _aYMCAF
_beng
_cIN-KoLT
041 _aeng
082 _a621.381
_b046 LAU
100 _aLau, John H
245 0 _aAdvanced MEMS packaging
260 _aNew Delhi
_bTMH
_c2010
300 _a552
653 _aElectronics
653 _aMems packaging
700 _aLee, Cheng Kuo
700 _aPremchandran, C S
942 _2ddc
_cBK
999 _c12932
_d12932