Madou, Marc J. <br/><br/>
Fundamentals of microfabrication and nanotechology vol.1  Solid-state physics, fluidics and analytical techniques .... 

 - 3rd 
 - Boca Raton  CRC Press  2012 
 - 641 
<br/><br/> Analytical techniques in micro and nanotechnology 
<br/><br/><label>ISBN: </label>9781420055115 
<br/><br/><label>Standard No.: </label>118933 
<br/><br/><label>Subjects--Index Terms: </label>Analytical techniques in Nanotechnology manufacturing Mechanical solid state physics 
<br/><br/><label>Dewey Class. No.: </label>620.5  / MAD