TY  - BOOK
AU  - Freund, L. B.
AU  - Suresh, S
TI  - Thin film materials: Stress, defect formation and surface evolution
SN  - 9780521822817
U1  - 621.3815 
PY  - 2003///
CY  - Cambridge
PB  - Cambridge university
KW  - Film buckling, bulging and peeling
KW  - Film deposition methods
KW  - film microstructures
KW  - Suresh
ER  -